What Are The Common Raman Applications in Semiconductor Industry?
In the semiconductor industry, Raman spectroscopy can help companies to study the basic properties of semiconductor materials. It includes the single element, such as silicon (Si), germanium (Ge), and composite materials semiconductor , such as Gallium Arsenide (GaAs). In the materials manufacturing stage, the characteristics of these semiconductor raw materials, will determine the quality of the following processes, such as wafer fabrication, IC packaging, thus the material manufacturing is the most important step.
Since these materials (including graphene) have their own composition and structure, they have different Raman spectral bands. The composition of the semiconductor materials, can be quantified by quantitative analysis with a Raman spectrometer, via measuring the concentration of germanium. One can also use a Raman spectrometer to measure the crystallinity of a semiconductor material, and its strain and stress.
In the process of wafer fabrication, the use of Raman spectrometer, as an process analysis and quality control tools, will improve the quality and increase the yield rate, further improve the overall productivity.
The common applications of using Raman spectroscopy in the semiconductor industry are:
- Material Purity
- Contamination Identification
- Alloy Composition
- Superlattice Structure
- Characterisation of Intrinsic Stress / Strain
- Defect Analysis
- Semiconductor Heterostructures
- Doping Effects on Heterojunction
- Photoluminescence Micro Analysis